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And go slooooooooow on the twisting. A gradual, continued application of moderate torque works WAY better than a sharp, strong application. That will just strip the heads. As you've found out.
Again... impacts are what strip the heads of the bolts. In any form. The best tool to use is a 1/4" driver and a bit converter going to the 5mm hex. just use one hand and slooooooowly apply pressure until you feel it starting to strip. Then, back of just the slightest of hairs and keep that torque on it... eventually the rubber grommet will stretch past its tension limit and its death grip on the valve cover will shear and the bolt will turn. I promise you!
Edit: PB blaster works wonders in these situations as well.
Not sure if you fixed it yet or not, but I had luck with ez-outs. I stripped 2 from my old 3.0. I drilled a small hole in the opening then gave it a couple wacks and wrenched it right out. 100% success rate for me, but i do consider myself fortunate in this case.